All Products

Metrology

• Wafer Geometry (thickness/ flatness/ bow/ warp), Resistivity, Stress and Type Measurements
• Resistivity Mapping for Semi-Insulating SiC, GaAs, InP & GaN
• Thin Film Thickness, Planarity, Bumps, TSV, MEMS, and Roughness Measurements

Defect Detection/Inspection

• Wafer Edge Inspection
• Crystal Slip Defect Detection (SlipFinder)
• Defect Detection on Ultra-Flat Wafers (Magic Mirror)
• Automated Microscope Defect Detection System
• Subsurface - Surface Defect Detection and Characterization

Software

• Visualization and Analysis Software
• Yield and Test Analysis Software

Solar Simulators & Test Systems

• Solar Simulators & Test Systems
• Pulse Analysis Spectro-Radiometer
• Xenon Lamps

UV Curing, UV Exposure, Lamps

• UV Curing System 
• UV Exposure Systems
• UV Lamps