Metrology
- Wafer Geometry (thickness/ flatness/ bow/ warp), Resistivity, Stress and Type Measurements
- Resistivity Mapping for Semi-Insulating SiC, GaAs, InP & GaN
- High precision surface grinding of metals, ceramics, and semiconductor materials
Defect Detection/Inspection
- Wafer Edge Inspection
- Crystal Slip Defect Detection (SlipFinder)
- Defect Detection on Ultra-Flat Wafers (Magic Mirror)
- Automated Microscope Defect Detection System
Software
Solar Simulators & Test Systems
UV Curing, UV Exposure, Lamps