Wafer Geometry & Resistivity

MX6012-DRAT-8C 300mm Wafer Sorter

Wafer Geometry (Thickness, TTV, Flatness, Bow, Warp), Stress, and Resistivity Gauges & Sorters

 
MX203

MX203-8-37
Thickness, TTV, Flatness, Bow/Warp, Stress
Wafer Sizes: 150 & 200mm
Wafer Thickness: 300 - 900µm
Bow/Warp: 300µm

MX204-8-21-V
Thickness, TTV, Flatness, Bow/Warp
Wafer Size: 150 & 200mm
Wafer Thickness: 100 - 760µm
Bow/Warp: 3000µm
 

MX6012 MX6012
Resistivity, Thickness, TTV, PN Type
Wafer Sizes: 200 & 300mm
Wafer Thickness: 600 - 900µm
Resistivity: 0.001 - 100 Ωcm
MX202Sorter MX202
Hi-throughput Belt Sorter
Thickness, TTV, Bow/Warp, Resistivity, P/N Type
Wafer Sizes: 150mm - 200mm
>500wph (200mm) >700wpm (150mm)
MX1018

MX2012-H
Thickness, TTV, Flatness, Bow/Warp, Stress
Wafer Sizes: 300mm
Wafer Thickness: 500 - 900µm

MX203Solar MX203-6-41-q
Solar Gauge
Thickness, TTV, Flatness, Bow/Warp
Wafer Sizes: 1002mm ,1252mm, & 1562 mm
Thickness: 160 - 700µm

MX604-ST
Solar Gauge
Thickness:  60 - 300µm
Resistivity:  0.06 - 6 Ωcm, 0.3 - 30 Ωcm
Wafer Sizes: 1002mm ,1252mm, & 1562 mm

E+H Metrology GmbH has been supplying the semiconductor and solar industries with non-contact capacitive metrology and resistivity gauges and sorters for over 25 years. From wafer manufacturers to fabs, front-end or back-end, as-sawn or backgrind, E+H has the solution for your metrology needs. On this page is just a small sampling of the over 36 different gauges and sorters available from E+H. If you don't see your solution, please contact Hologenix to discuss your specific requirements or visit E+H Metrology GmbH.