Wafer Geometry & Resistivity

MX6012-DRAT-8C 300mm Wafer Sorter

Wafer Geometry (Thickness, TTV, Flatness, Bow, Warp), Stress, and Resistivity Gauges & Sorters

MX203-8-37 Thickness, TTV, Flatness, Bow/Warp, Stress Wafer Sizes: 150 & 200mm Wafer Thickness: 300 - 900µm Bow/Warp: 300µm MX204-8-21-V Thickness, TTV, Flatness, Bow/Warp Wafer Size: 150 & 200mm Wafer Thickness: 100 - 760µm Bow/Warp: 3000µm   MX6012 Resistivity, Thickness, TTV, PN Type Wafer Sizes: 200 & 300mm Wafer Thickness: 600 - 900µm Resistivity: 0.001 - 100 Ωcm MX202 Hi-throughput Belt Sorter Thickness, TTV, Bow/Warp, Resistivity, P/N Type Wafer Sizes: 150mm - 200mm >500wph (200mm) >700wpm (150mm) MX2012-H Thickness, TTV, Flatness, Bow/Warp, Stress Wafer Sizes: 300mm Wafer Thickness: 500 - 900µm MX203-6-41-q Solar Gauge Thickness, TTV, Flatness, Bow/Warp Wafer Sizes: 1002mm ,1252mm, & 1562 mm Thickness: 160 - 700µm MX604-ST Solar Gauge Thickness:  60 - 300µm Resistivity:  0.06 - 6 Ωcm, 0.3 - 30 Ωcm Wafer Sizes: 1002mm ,1252mm, & 1562 mm

E+H Metrology GmbH has been supplying the semiconductor and solar industries with non-contact capacitive metrology and resistivity gauges and sorters for over 25 years. From wafer manufacturers to fabs, front-end or back-end, as-sawn or backgrind, E+H has the solution for your metrology needs. On this page is just a small sampling of the over 36 different gauges and sorters available from E+H. If you don't see your solution, please contact Hologenix to discuss your specific requirements or visit E+H Metrology GmbH.