Wafer Geometry (thickness/ flatness/ bow/ warp), Resistivity, Stress and Type Measurements
Defect, Detection, Inspection, Metrology
Automated Microscope for CD, Overlay, and Defect Detection System
Automatic Defect Detection & Classification Automated Die Inspection
Metrology
SEMI-INSULATING RESISTIVITY MEASUREMENTS
Resistivity Measurements for Semi-Insulating SiC, GaAs, InP & GaN