MX601 Resistivity Measurement Gauge

SEMI-INSULATING RESISTIVITY MEASUREMENTS

E+H

MX601 Contactless Wafer Resistivity Gauge 

  • Resistivity of semi-insulating materials (GaAs, SiC, InP, GaN)
  • Non-contact, capacitive measuring method
  • 350 µm - 650 µm wafer thickness range
  • 5 E4 - 5 E9 Ohm•cm measurement range
  • 100mm - 200mm wafer sizes
Files and Docs
MX601_V2.pdf