Wafer Edge Inspection

Hologenix 200mm and 300mm Automated Edge Defect Detection

Automatically detect mid & large sized defects (diameter larger than 500um) such as Cracks, Chips, Scratches and Particles at the wafer edge.

High-Resolution version automatically detects small defects (diameter larger than 30um).

Images of the defects are automatically stored on the PC.

KLARF reporting with defect images.

Options: OCR, Bar Code Reader, Fan Filter Unit with HEPA-ULPA, and Host communication.