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NGS - Automated Defect Detection, Classification, and Metrology System     

  • Automatic Defect Detection & Classification
  • Automated Die Inspection

Wafer Geometry & Resistivity

MX6012-DRAT-8C 300mm Wafer Sorter

COREMA, Resistivity Mapping, Semi Insulating

COREMA - WT System

Resistivity Mapping, Mobility and Carrier Concentration Measurements for Semi-Insulating SiC, GaAs,...

Defect Detection for Ultra-Flat Wafers     

 The Magic Mirror Inspection Method

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